CMU MEMS Laboratory Publication List

 

 
1. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF)
2. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
3. H. Xie, L. Erdmann, Q. Jing and G. Fedder, Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 181-184, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
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