CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 181-184, March 27-29, 2000, San Diego, CA, USA.
Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
H. Xie, L. Erdmann, Q. Jing and G. Fedder
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 µm, and resonant frequency is 6.17 kHz, which are in good agreement with the Maxwell field simulation and the behavioral simulation results using the NODAS library. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.
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