CMU MEMS Laboratory Publication List |
1. | J. Liu, G. Fedder, S. Sassolini and N. Sarkar, Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures, in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI '06), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
[Abstract] | Full paper not available from outside CMU |
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2. | N. Sarkar, C. Baur, E. Stach, Z. Jandric, R. Stallcup, M. Ellis, G. Skidmore and G. Fedder, Modular MEMS Experimental Platform for Transmission Electron Microscopy, in Proceedings of the 19th IEEE International Conference on Microelectromechanical Systems (MEMS '06), pp. 146-149., Jan. 31-Feb. 4, 2006, Istanbul, Turkey.
[Abstract] | pdfs/ieee/mems/0255_sarkar-2006.pdf This paper is not yet available for download. |
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3. | P. Gilgunn, J. Liu, N. Sarkar and G. Fedder, CMOS-MEMS Lateral Electrothermal Actuators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 103-114, November 30, -0001.
[Abstract] | pdfs//unknown/0268_gilgunn-0000.pdf This paper is not yet available for download. |
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4. | R. Hollis, D. O’Hallaron, G. Fedder, N. Sarkar and J. Jones, Vision Guided Pick and Place in a Minifactory Environment, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), November 30, -0001.
[Abstract] | pdfs//unknown/0251_hollis-0000.pdf This paper is not yet available for download. |
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