CMU MEMS Laboratory Publication List

 

 
1. J. Liu, G. Fedder, S. Sassolini and N. Sarkar, Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures, in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI '06), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
[Abstract] | Full paper not available from outside CMU
2. N. Sarkar, C. Baur, E. Stach, Z. Jandric, R. Stallcup, M. Ellis, G. Skidmore and G. Fedder, Modular MEMS Experimental Platform for Transmission Electron Microscopy, in Proceedings of the 19th IEEE International Conference on Microelectromechanical Systems (MEMS '06), pp. 146-149., Jan. 31-Feb. 4, 2006, Istanbul, Turkey.
[Abstract] | pdfs/ieee/mems/0255_sarkar-2006.pdf This paper is not yet available for download.
3. P. Gilgunn, J. Liu, N. Sarkar and G. Fedder, CMOS-MEMS Lateral Electrothermal Actuators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 103-114, November 30, -0001.
[Abstract] | pdfs//unknown/0268_gilgunn-0000.pdf This paper is not yet available for download.
4. R. Hollis, D. O’Hallaron, G. Fedder, N. Sarkar and J. Jones, Vision Guided Pick and Place in a Minifactory Environment, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), November 30, -0001.
[Abstract] | pdfs//unknown/0251_hollis-0000.pdf This paper is not yet available for download.
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