CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the 19th IEEE International Conference on Microelectromechanical Systems (MEMS), pp. 146-149., Jan. 31-Feb. 4, 2006, Istanbul, Turkey.
Modular MEMS Experimental Platform for Transmission Electron Microscopy
N. Sarkar, C. Baur, E. Stach, Z. Jandric, R. Stallcup, M. Ellis, G. Skidmore and G. Fedder
ABSTRACT:
© 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
This paper will live at http://www.ece.cmu.edu/~mems/pdfs/ieee/mems/0255_sarkar-2006.pdf, but it is not currently available. PATH: pdfs/ieee/mems/0255_sarkar-2006.pdf


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