CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures
J. Liu, G. Fedder, S. Sassolini and N. Sarkar
© 2006 Nano Science and Technology Institute. All rights reserved.
Full paper not available from outside CMU

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