CMU MEMS Laboratory Publication Abstract

 

	in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
	Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures
	J. Liu, G. Fedder, S. Sassolini and N. Sarkar ABSTRACT:
	© 2006 Nano Science and Technology Institute. All rights reserved.
	Full paper not available from outside CMU

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