CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the International Electron Devices Meeting (IEEE IEDM), December 5-7, 2005, Washington D.C..
MEMS Resonant Mixer Filters
G. Fedder
ABSTRACT:
RF mixer-filters made by micromachining composite metal and dielectric interconnect layers within foundry CMOS are a potential component in on-chip receivers. Through the electrostatic voltage-squared nonlinearity, mixer-filters downconvert to an intermodulation frequency set by the mechanical resonance enabling higher gain than resonant filters having a RF signal output. The research is leading toward resonant mixer-filters integrated with preamplifiers and having 0 dB insertion gain with sub-mW power.
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Full paper (PDF) (opens in new window).


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