CMU MEMS Laboratory Publication List

 

 
1. J. Liu, G. Fedder, S. Sassolini and N. Sarkar, Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures, in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI '06), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
[Abstract] | Full paper not available from outside CMU
2. J. Liu, M. Noman, J. Bain, T. Schlesinger and G. Fedder, CMOS-MEMS Probes for Reconfigurable ICís, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 515-518, November 30, -0001.
[Abstract] | pdfs//unknown/0273_liu-0000.pdf This paper is not yet available for download.
3. P. Gilgunn, J. Liu, N. Sarkar and G. Fedder, CMOS-MEMS Lateral Electrothermal Actuators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 103-114, November 30, -0001.
[Abstract] | pdfs//unknown/0268_gilgunn-0000.pdf This paper is not yet available for download.
4. J. Liu and G. Fedder, Silicon Undercut Characterization in a CMOS-MEMS Process, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 505-508, November 30, -0001.
[Abstract] | pdfs//unknown/0263_liu-0000.pdf This paper is not yet available for download.
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