Microelectromechanical Systems (MEMS) Researchers Come to Town


September 18, 2003

Carnegie Mellons Microelectromechanical Systems (MEMS) Laboratory is developing miniature sensor and actuator systems using batch-fabrication processes, especially integrated-circuit fabrication. Sensors are made by combining microstructures and circuits on a single silicon chip for high-performance and low-cost results. More than 100 representatives from the MEMS industry attended their third annual conference at the Carnegie Science Center recently, according to the Pittsburgh Post-Gazette article, New Pittsburgh: Proponents of tiny chips see big things for industry.


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