Equipment
		Photolithography DWL66 Laser Lithography - Heidelberg Etching Xactix Xenon Diflouride Etching System- XACTIX UV Flood Exposure- Cobilt STS (cleanroom) Plasma Therm (cleanroom) Deposition Spinner-Laurel Technologies Sputtering System- Lesker Evaporation/Sputtering System- Indel Rapid Thermal Annealer- AG Associates Wet Chemistry Acid Wet Bench Solvent Wet Bench Packaging West Bond Wire Bonder Characterization Wentworth Probe Station Microvision System Rotary Stage Vibration Exciter Wyko White Light Interferometer B&K Anechoic Box HP Network/Spectrum Analyzer HP Impedance Analyzer SR830 lockin amplifier - User Manual - Brochure Ellipsometer- Rudolph Technologies Profilometer- Dektak Microscope- Leica RF Probe Station