Cobilt UV Flood Exposure

Cobilt UV Flood Exposure


Description

The Cobilt UV exposure system is for exposing samples to ultraviolet light for photolithography purposes. The stage is about 6" across. The instrument lacks documentation, but the intensity is believed to be something less than 10 mW/cm2.

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Usage Policy

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Contact

Name Office Extension Email
 Feifei Cao  REH 228  8x6990  fcao at andrew.cmu.edu

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Qualified Users List

Name Office Extension Email
       
       
etc.      

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Standard Operating Procedures

  1. Turn power supply on.
  2. Turn Compressed air on.
  3. Place wafer / mask onto stage, you can use the template if desired. (the timer on this system is broken, so you have to keep time your self)
  4. Turn on the system.
  5. Press and release the ignitor button on the power supply, you will see the UV light come on.
  6. Press and hold the "expose" button for the length of desired exposure.
  7. Turn off system, turn off compressed air, turn off power supply.
nnnp

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Application Notes

The UV Exposure system has been calibrated on 3/27/03 and should hopefully work better than in the past.
Do not change any of the settings onthe rear of the system, for this will place it out of calibration. Please use it as described on the web page.

FYI and so you can calculate your exposure time, the intensity of the UV bulb is approx 3.3mW per sq. cm.

The Lamp should not be turned on and off and on again within a 1/2 hour time period. Reason: Its a high pressure mercury lamp and in doing so the lamp may explode and therefore ruin the machine. So it is essential that you log in your usage of the machine and before you use it, check the log to make sure someone else didn't just turn it off.

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Useful Links

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Miscellaneous

The UV Exposure system requires a 200 Watt Mercury bulb. Its life-span is 70 - 100 cycles (on/off). The part # is "OS HBO 200W/2"

The vendor is:
McBain Instruments
9601 Variel Avenue
Chatsworth, CA 91311
(818) 998-2702

It was last changed on 3/15/03

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