Laurel Technologies WS-400-6NPP-LITE Spinner

Laurel Technologies WS-400-6NPP-LITE Spinner


Description

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Usage Policy

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Contact

Name Office Extension Email
       

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Qualified Users List

Name Office Extension Email
       
       
etc.      

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Standard Operating Procedures

  1. Turn on spinner. This will allow you to see the display and what the current settings are.
  2. There are multiple programs that can be setup. In the upper right-hand corner of the display is a letter from A-J (I think), this is the program that you are using.
  3. You can add as many steps as you need. I am not sure what the max is.
  4. To setup a new program with 2 steps for example: 6 sec @ 600rpm / 30sec @ 4000 rpm
    1. Press F1 (this will automatically put you in the setup phase for step 1)
    2. Move the cursor to the seconds or minutes position on the display using the “cursor” buttons.
    3. Change the time to 6 sec by using the value buttons.
    4. Move the cursor to the rpm position on the display by using the “cursor” buttons.
    5. Change the rpm to 600 by using the value buttons.
    6. Press the “Add Step” button. It should show step 2/2 on the display.
    7. Move the cursor to the seconds or minutes position on the display using the “cursor” buttons.
    8. Change the time to 30 sec by using the value buttons.
    9. Move the cursor to the rpm position on the display by using the “cursor” buttons.
    10. Change the rpm to 4000 by using the value buttons.
    11. Press F1
  5. Open lid and center your wafer on the stage.
  6. Close lid and press the “vacuum” button
  7. Add your HMDS, Photo-resist, or whatever you’re spinning onto the wafer through the hole in the lid.
  8. Press “Run / Stop” button to run program.
  9. You can also edit an existing program by basically pressing the “Program Select” button until you find a program that has the same number of steps that you need to run and pressing the “F1” button; and follow the same steps above except after step “e”, if you are editing a program that already has a second step in the program, just press the “step” button to take you to it.
  10. If you need to delete a step, go to that step and press the “Delete Step” button.

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Application Notes

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Useful Links

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Miscellaneous

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