AG Associates Heatpulse 210 Rapid Thermal Annealer

AG Associates Heatpulse 210 Rapid Thermal Annealer


Description

Used to anneal samples up to 950 C. The samples are kept at room temperature until the heating lamps have reached the desired temperature. Then, the sample can be inserted in to the machine. The sample will reach the annealing temperature quickly. After the desired annealing time, the sample is removed from the machine, back to room temperature. Inert gas (such as Ar) is used to protect the sample from oxidizing at any point of the process.

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Usage Policy

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Contact

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Qualified Users List

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etc.      

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Standard Operating Procedures

(detailed specifications for all components of the RTA system can be found in the appropriate pamphlet on the stainless steel shelves adjacent to the sputtering system.)
* observation items
- action items

General Operating Safety
  * This piece of equipment is a source of high voltage, high current and high thermal energy. Do not use it without proper training. Respect it.
  - If a malfunction occurs, do not attempt to fix the problem yourself. The only appropriate action by the typical user is the throwing of the main power switch (on the switch box mounted on the wall to the left of the RTA unit) to the OFF position if the unit appears to be in a state which is harmful to itself or lab users. Contact the appropriate personnel if malfunctions occur.

Operating Procedures
  - Observe that system appears to be in good working condition.
  - Open sliding shuttle door and mount sample on Si substrate holder
  - Close door
  - Open regulator valve on appropriate gas bottle if you are annealing in a non-air ambient
  - Turn on power switches to annealer module (left side of front panel) and keyboard control module (left side of back panel)
  - Program desired temperature setpoint and dwell time
     - type "Return" to enter set mode
     - type "S" to enter time/temperature setpoint mode
     - type "A" to enter temperature setpoint mode
     - key in desired temperature setpoint
     - type "Return"
     - type "S" to enter time/temperature setpoint mode
     - type "T" to enter dwell time mode
     - key in desired dwell time (in seconds)
     - type "Return"
     - type "A" to run cycle


  * This unit is incapable of temperature control below 300 C and incapable of accurate temperature control below about 400 C.
  * This unit is not designed for annealing times over several minutes (ie RAPID thermal annealer). High-temperature anneals for extended time periods unnecessarily shorten the lifetime of the unit. Use a conventional furnace for extended-time anneals.
  * For more sophisticated temperature profile control, refer to the Owners Manual.

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Application Notes

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Useful Links

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Miscellaneous

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