Dektak 3 Profiler

Dektak 3 Profiler


Description

The Dektak 3 Surface Profilometer is an instrument to measure the vertical profile of samples, thin film thickness, and other topographical features, such as film roughness or wafer bowing.

A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. The instrument can measure small surface variations in vertical stylus displacement as a function of position. The Dektak profilometer can measure small vertical features ranging in height from 100 to 650,000 on a 5" Diameter Sample Stage. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus is 12.5 microns, and the horizontal resolution is controlled by the scan speed and scan length. There is a horizontal broading factor which is a function of stylus radius and of step height. This broading factor is added to the horizontal dimensions of the steps. The stylus tracking force is factory-set to 50 milligrams.

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Usage Policy

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Contact

Name Office Extension Email
Bohzi Yang      

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Qualified Users List

Name Office Extension Email
       
       
etc.      

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Standard Operating Procedures

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Application Notes

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Useful Links

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Miscellaneous

Contact information for sales & service are:

Terry Manning
Veeco Metrology
2650 E. Elvira Road
Tucson,AZ 85706
(520)741-1044x1175
tmanning@veeco.com

and

Jim Pohnan
Byron Ellis Associates
440-826-0559

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