Dektak 3 Profiler
A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. The instrument can measure small surface variations in vertical stylus displacement as a function of position. The Dektak profilometer can measure small vertical features ranging in height from 100 Å to 650,000 Å on a 5" Diameter Sample Stage. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus is 12.5 microns, and the horizontal resolution is controlled by the scan speed and scan length. There is a horizontal broading factor which is a function of stylus radius and of step height. This broading factor is added to the horizontal dimensions of the steps. The stylus tracking force is factory-set to 50 milligrams.
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