Superuser List for Microfabrication Chemistry Lab

Equipment Name Email
Ellipsometer- Rudolph Lifu Zhou lifu@andrew.cmu.edu
Microscope- Leica Kevin Frederick kevinf@andrew.cmu.edu
Rapid Thermal Annealer- AG Associates Dan Ewing dje@andrew.cmu.edu
Profilometer- Dektak Kevin Frederick kevinf@andrew.cmu.edu
Spinner- Laurel
Sputtering System- Lesker George Lopez georgel@andrew.cmu.edu
Sputtering/Evaporation- Indel Kevin Frederick kevinf@andrew.cmu.edu
UV Flood Exposure- Cobilt John Neumann jneumann@ece.cmu.edu
Xetch Etching- XACTIX Matte Zeleznik maz2@andrew.cmu.edu
Acid Wet Bench Fernando Alfaro jalfaro@andrew.cmu.edu
Solvent Wet Bench Fernando Alfaro jalfaro@andrew.cmu.edu
Vacuum Oven
Ovens Bozhi Yang bozhi@andrew.cmu.edu

Occupation Name Email
Facilities Tony Nolla nolla@cmu.edu
Hazardous Waste Disposal Xiaochun Wu xiaochun@andrew.cmu.edu
Safety Qiang Liqiangl@andrew.cmu.edu
Security System Tony Nolla nolla@cmu.edu
MSDS Upkeep Tony Nolla nolla@cmu.edu
Vacuum Pump Check Ashutosh ashutosh@andrew.cmu.edu
Burned-out Lights Chae-Deok Lee cdlee@andrew.cmu.edu