STANDARD OPERATING PROCEDURES

Microfabrication Chemistry Lab

• Acid and Solvent Wet Benches
• Ellipsometer- Rudolph Technologies
• Profilometer- Dektak
• Rapid Thermal Annealer- AG Associates
• Spinner- Laurel Technologies
• Sputtering System- Lesker
• Evaporation/Sputtering System- Indel
• UV Flood Exposure- Cobilt
• Xactix Xenon Diflouride Etching System- XACTIX
• Microscope- Leica