Ellipsometer
Description
This Rudolph Ellipsometer is an instrument to measure the thickness and refractive index of thin films.
A beam of He-Ne laser is circularly polarized by a compensator and then incident on to the surface of sample at an angle(70 degree is the default). The relative phase and amplitude change of s and p polarized light are analyzed to calculate the film thickness and refractive index. This device is capable of measuring film thickness varying from several tens of nm to 10 micrometer accurate to 1 nm, but a good guess is needed before measurement. Calculation of thickness and index for single layer and double layer structure can be done automatically.
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Usage Policy
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Contact
| Name |
Office |
Extension |
Email |
| Lifu Zhou |
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lifu@andrew.cmu.edu |
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Qualified Users List
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Standard Operating Procedures
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Application Notes
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Useful Links
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Miscellaneous
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