CMU MEMS Laboratory Publication Abstract

 

	in International Journal of Nonlinear Sciences and Numerical Simulation, pp. 319-324, vol.3, no. 3-4, August 2002.
	Phase and Vibration Analysis for a CMOS-MEMS Gyroscope
	H. Xie, G. Fedder, Y. Pan and W. Frey ABSTRACT:
	No abstract available.
	© 2002 Freund Publishing House Ltd. All rights reserved.
	Full paper not available from outside CMU

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