CMU MEMS Laboratory Publication Abstract


in Journal of Aerospace Engineering, pp. 65-67, April 2003.
Integrated microelectromechanical gyroscopes
H. Xie and G. Fedder
© 2003 ASCE & American Society of Civil Engineers. All rights reserved. This journal is copyrighted. Individual articles in this journal are copyrighted by the society, as indicated on each article. Individual articles may be downloaded for personal use; users are forbidden to reproduce, republish, redistribute, or resell any materials from this journal in either machine-readable form or any other form without permission of the society or payment of the appropriate royalty for reuse.
Full paper not available from outside CMU

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