CMU MEMS Laboratory Publication Abstract


in Proceedings of 6th Symposium on Micro Total Analysis Systems (MicroTAS), November 3-7, 2002, Nara, Japan.
In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
G. C. Lopez, A. J. Rosenbloom, V. W. Weedn and K. Gabriel
A novel microfluidic fabrication technique which allows in situ formed silicon microchannels and does not necessitate substrate bonding is presented. A gas-permeable polymer membrane acts as the top surface of the microchannel, allowing xenon difluoride (XeF2) etchant to pass unobstructed to the silicon substrate. Exposed silicon areas on the wafer are then etched isotropically.
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Full paper not available from outside CMU

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