CMU MEMS Laboratory Publication Abstract

 

in Proceedings of 6th Symposium on Micro Total Analysis Systems (MicroTAS), November 3-7, 2002, Nara, Japan.
In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
G. C. Lopez, A. J. Rosenbloom, V. W. Weedn and K. Gabriel
ABSTRACT:
A novel microfluidic fabrication technique which allows in situ formed silicon microchannels and does not necessitate substrate bonding is presented. A gas-permeable polymer membrane acts as the top surface of the microchannel, allowing xenon difluoride (XeF2) etchant to pass unobstructed to the silicon substrate. Exposed silicon areas on the wafer are then etched isotropically.
© 2002 Kluwer Academic Publishers. Abstracting is permitted with credit to the source. All other requests for information and reprints should be address to Kluwer Academic Publicshers Order Department via kluwar@wkap.com or phone +1 781 871 6600 )for customers in North and South America) or at services@wkap.nl or phone +31 78 639 23 92 (for customers in all other countries).
Full paper not available from outside CMU


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