CMU MEMS Laboratory Publication Abstract

 

	in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 495-599, January 20-24, 2002, Las Vegas, NV, USA.
	A SCS CMOS Micromirror for Optical Coherence Tomographic Imaging
	H. Xie, Y. Pan and G. Fedder ABSTRACT:
	This paper reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17º when a 15 mA current is applied. Cross-sectional images of 500x1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.
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