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In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical data. Cubic spline interpolation is used to evaluate model functions during simulation. Numerical linear models are also constructed for DC analysis, AC analysis and feedback system design. This method is demonstrated by modeling and simulating a MEMS accelerometer.
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