CMU MEMS Laboratory Publication Abstract

 

in IEEE Transactions on Circuits & Systems II (TCAS), Volume 46, Issue 10, pp. 1309-1315, October 1999.
A Hierarchical Circuit-Level Design Methodology Microelectromechanical Systems
G. Fedder and Q. Jing
ABSTRACT:
A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sensors, resonant actuators and filters are designed using a small set of geometrically parameterized plate, beam, gap and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements.
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Full paper (PDF) (opens in new window).


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