CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 7-10, March 27-29, 2000, San Diego, CA, USA.
Top-Down Design of MEMS
G. Fedder
ABSTRACT:
A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.
© 2000 Computational Publications. Abstracting is permitted with credit to the source. Other copying, reprint or repoduction requests should be addressed to: Copyrights Manager, Computational Publications, Copyright Office, 899 Rue Jean de Gingins, 01220 Divonne les Bains, France. Computational Publications is a subsuduary of the Applied Computational Researh Society, a non-profit organization
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