CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 7-10, March 27-29, 2000, San Diego, CA, USA.
Top-Down Design of MEMS
G. Fedder
A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.
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