CMU MEMS Laboratory Publication Abstract


in Journal of VLSI Signal Processing-Systems for Signal, Image, and Video Technology, vol. 21, no. 3, pp. 233-249, July 1999.
Hierarchical Mixed-Domain Circuit Simulation, Synthesis and Extraction Methodology for MEMS
T. Mukherjee and G. Fedder
Emerging results for mixed-domain circuit simulation, a component-level synthesis strategy, and a layout extractor is presented for use in design of microelectromechanical systems (MEMS). The mixed-domain circuit representation is based on Kirchhoffian network theory. Micromechanical and electromechanical components may be partitioned hierarchically into low-level reusable elements. The MEMS component-level synthesis approach uses optimization to generate microstructure layout that meets specified performance criteria. A feature-recognition based extractor for verification translates layout geometry into the mixed-domain circuit representation. A common MEMS component, the integrated microresonator, demonstrates the use of these tools. Lumped-parameter MEMS simulation of the resonant frequency matches finite-element analysis to 1 % and fabricated resonators match to within 4 % of the synthesized performance. Based on this initial work, a hierarchical structured design methodology for integrated microsystems that is compatible with standard VLSI design is proposed.
© 1999 Kluwer Academic Publishers. Abstracting is permitted with credit to the source. All other requests for information and reprints should be address to Kluwer Academic Publicshers Order Department via or phone +1 781 871 6600 )for customers in North and South America) or at or phone +31 78 639 23 92 (for customers in all other countries).
Full paper not available from outside CMU

This page was generated in 0.007178 seconds at 09:35:41 am EST on 22 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon