CMU MEMS Laboratory Publication Abstract

 

	in Proceedings of International Symposium on Smart Structures and Microsystems 2000 (IS3M), pp. 1-6, October 19-21, 2000, Hong Kong.
	An Elastically Gimbaled Z-Axis CMOS-MEMS Gyroscope
	H. Luo, G. Fedder and R. Carley ABSTRACT:
	This paper presents a vertical (Z-axis) CMOS-MEMS gyroscope with a measured noise floor of 0.03º/sec/Hz½ and 1% linearity in the range of -360º/sec to 360º/sec. The gyroscope is fully compatible with conventional CMOS processes, which enable the integration of most of the conditioning circuits. It is fabricated in a three-metal-layer 0.5 µm CMOS process followed by a two-step dry etch release. An improved out-of-plane curl matching technique provides the sidewall alignment to 1 µm. A new differential capacitive sensing interface is employed.
	© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
	Full paper (PDF) (opens in new window).

	This page was generated in 0.015033 seconds at 01:53:49 am UTC on 19 Apr 2024.
	overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon