CMU MEMS Laboratory Publication Abstract

 

in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp. 55-62, May 9-11, 2000, Paris, France.
Numerical Spring Models for Behavioral Simulation of MEMS Inertial Sensors
S. V. Iyer and T. Mukherjee
ABSTRACT:
Design of springs is a very important step in the design process of inertial sensors. A procedure for computing the spring stiffness for any single-chain configuration of beams and a translator which converts beam-based schematic representation of inertial sensors to higher-level behavioral representation are implemented. Combining the spring stiffness computation with the translator, spring-mass behavioral models of inertial sensors are generated. The behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral schematics are 10 to 100 times faster than simulation of the atomic-elements based schematics and the results match to within 5%.
© 2000 SPIE - The International Society for Optical Engineering. Any request of reprint should be addressed to spie@spie.org or phone +1 260 676 3290.
Full paper not available from outside CMU


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