CMU MEMS Laboratory Publication Abstract


in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation
G. Zhang, H. Xie, L. E. deRosset and G. Fedder
We present successful experimental results from the first lateral capacitive accelerometer to be designed and manufactured in a conventional CMOS process. Compatibility with conventional CMOS provides advantages of low cost, high yield and fast prototyping that should be transferable to any CMOS foundry. A fully differential capacitive-bridge interface which can not be realized in polysilicon technology is designed and implemented. Out-of-plane curling associated with the composite structural layers is compensated to first order through a curl matching technique. The prototype accelerometer has a measured sensitivity of 1.2 mV/g and a 0.5 mg/rtHz noise floor at the output of the sensing element.
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