CMU MEMS Laboratory Publication Abstract

 

in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation
G. Zhang, H. Xie, L. E. deRosset and G. Fedder
ABSTRACT:
We present successful experimental results from the first lateral capacitive accelerometer to be designed and manufactured in a conventional CMOS process. Compatibility with conventional CMOS provides advantages of low cost, high yield and fast prototyping that should be transferable to any CMOS foundry. A fully differential capacitive-bridge interface which can not be realized in polysilicon technology is designed and implemented. Out-of-plane curling associated with the composite structural layers is compensated to first order through a curl matching technique. The prototype accelerometer has a measured sensitivity of 1.2 mV/g and a 0.5 mg/rtHz noise floor at the output of the sensing element.
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