CMU MEMS Laboratory Publication Abstract


in Proceedings of 1998 IEEE/VIUF International Workshop on Behavioral Modeling and Simulation (BMAS), October 26-28, 1998, Orlando, FL, USA.
NODAS 1.3 - Nodal Design Of Actuators And Sensors
Q. Jing and G. Fedder
A circuit-level methodology for top-down hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. An abstract layout view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. Suspended-MEMS inertial sensors, resonant actuators and filters are designed using a small set of geometrically parameterized plate, beam, gap and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements.
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