CMU MEMS Laboratory Publication Abstract

 

in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 162-165, January 21-25, 2001, Interlaken, Switzerland.
A CMOS-MEMS Lateral-axis Gyroscope
H. Xie and G. Fedder
ABSTRACT:
This paper reports on the experimental results from the first design of a CMOS lateral-axis vibratory gyroscope that utilizes comb fingers for both actuation and sensing. The fabrication is compatible with standard CMOS processes and the design has an integrated, fully-differential capacitive interface circuit. This gyroscope design uses integrated comb drives for out-of-plane actuation, and is motivated by the desire to integrate three-axis gyroscopes on a single chip. The packaged gyroscope operates at atmospheric pressure with a sensitivity of 0.12 mV/deg/s and the resonant frequency of the drive mode is thermomechanically tuned between 4.2 - 5.1 kHz. Resonant frequency matching between the drive and sense modes is realized by integrating a polysilicon heater inside the spring beams.
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