CMU MEMS Laboratory Publication Abstract

 

	in Proceedings of 2000 IEEE/ACM/VIUF Intl. Workshop on Behavioral Modeling and Simulation (BMAS), pp. 37-41, October 19-20, 2000, Orlando, FL, USA.
	A Table-Based Time-Domain Simulation Method for Oversampled Microelectromechanical Systems
	J. Wu and R. Carley ABSTRACT:
	This paper describes a table-based behavioral modeling method and an efficient transient simulation method for oversampled MEMS systems. A system is represented by a set of coupled ordinary differential equations (ODEs) numerically described by table-based macromodels. Cubic spline interpolation is used to evaluate the model functions. The instant settling approximation and the explicit ODE solver are employed to enable efficient transient simulation. These methods are used to simulate a delta-sigma MEMS accelerometer and demonstrate high simulation efficiency.
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