CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM), pp. 143-146, April 19-21, 1999, San Juan, PR, USA.
MEMS Component Extraction
B. Baidya, S. K. Gupta and T. Mukherjee
ABSTRACT:
Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and components is crucial for a structured design methodology in MEMS (Microelectromechanical system). As MEMS design tends to be layout-centric, design evaluation requires extraction of the atomic elements from the layout. Furthermore, MEMS component extraction reduces the size of the simulation problem, enabling efficient design evaluation. An improved extraction module has been developed for component extraction that generates the netlist of the schematic corresponding to the layout. An ordinary differential equation solver combined with component models can then be used for efficient functional verification of the layout by simulating the extracted netlist. The utility of the extractor is demonstrated for a variety of MEMS devices composed of different types of springs and electrostatic actuators and sensors. Simulation time for the extracted netlist decreased by a factor of 10 when component extraction and component models were used compared to a netlist of only atomic elements.
© 1999 Computational Publications. Abstracting is permitted with credit to the source. Other copying, reprint or repoduction requests should be addressed to: Copyrights Manager, Computational Publications, Copyright Office, 899 Rue Jean de Gingins, 01220 Divonne les Bains, France. Computational Publications is a subsuduary of the Applied Computational Researh Society, a non-profit organization
Full paper not available from outside CMU


This page was generated in 0.005107 seconds at 06:05:53 pm EST on 21 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon