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Microelectromechanical systems (MEMS) integrating multidomain
sensors and actuators with conventional microelectronic
batch fabrication processes are becoming increasingly complex.
In order to design systems with large numbers of multi-domain
components, we need to use a hierarchical structured design
approach, with design at the schematic level instead of the traditional
layout representation used in MEMS design. However,
since fabrication can only be done from a layout representation,
an automatic or manual layout generation from schematic is necessary.
It is essential to be able to translate from the layout representation
back to the schematic to reason about layout
correctness in meeting the schematic’s function as well as to
extract geometric parameters for functional simulation. An
extraction module is developed which reads in the geometric
description of the layout structure and reconstructs the corresponding
schematic. This schematic can then be fed to an ordinary
differential equation solver or can be compared with the
design schematic to validate the correctness of the designed layout.
The extraction module also minimizes the number of nodes
required to represent the schematic as a netlist. The results presented
show the success of the module for some example MEMS
designs.
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