CMU MEMS Laboratory Publication Abstract

 

	in PUBLICATION NAME NOT AVAILABLE (Unknown), pp. 10-13, November 30, -0001.
	Flip-Chip Integrated SOI-CMOS-MEMS Fabrication Technology
	P. Gilgunn and G. Fedder ABSTRACT:
	© 0000 All rights reserved by publisher.
	Full paper not available from outside CMU

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