CMU MEMS Laboratory Publication Abstract

 

in PUBLICATION NAME NOT AVAILABLE (Unknown), pp. 240-243, November 30, -0001.
Self-Assembled 275nm-Gap Electrodes for CMOS-MEMS Resonators and its Precision DC Charge-Based Capacitance Measurement
C. Lo and G. Fedder
ABSTRACT:
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Full paper not available from outside CMU


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