CMU MEMS Laboratory Publication Abstract

 

	in PUBLICATION NAME NOT AVAILABLE (Unknown), pp. 240-243, November 30, -0001.
	Self-Assembled 275nm-Gap Electrodes for CMOS-MEMS Resonators and its Precision DC Charge-Based Capacitance Measurement
	C. Lo and G. Fedder ABSTRACT:
	© 0000 All rights reserved by publisher.
	Full paper not available from outside CMU

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