CMU MEMS Laboratory Publication Abstract

 

	in PUBLICATION NAME NOT AVAILABLE (Unknown), pp. 876-879., November 30, -0001.
	Tri-Axial High-G CMOS-MEMS Capacitive Accelerometer Array
	A. Wung, R. V. Park, J. K. Rebello and G. Fedder ABSTRACT:
	© 0000 All rights reserved by publisher.
	Full paper not available from outside CMU

	This page was generated in 0.011075 seconds at 02:13:09 am UTC on 19 Apr 2024.
	overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon