CMU MEMS Laboratory Publication Abstract |
in PUBLICATION NAME NOT AVAILABLE (Unknown), pp. 2449-2452, November 30, -0001. | |
On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators | |
C. Lo and G. Fedder
ABSTRACT: |
|
© 0000 All rights reserved by publisher. | |
Full paper not available from outside CMU |
This page was generated in 0.018453 seconds at 03:22:39 am UTC on 26 Apr 2024. | |
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon |