CMU MEMS Laboratory Publication Abstract


in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head), pp. 4, June 4-8, 2006, Hilton Head Island, SC, USA.
Desensitizing Method for Measurement of Third-order Intermodulation Distortion in CMOS-MEMS Resonators
C. Lo, G. Fedder, J. Stillman
© 2006 Transducers Research Foundation. All Rights Reserved.
This paper will live at, but it is not currently available. PATH: pdfs/trf/hilton_head/0253_lo-2006.pdf

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