CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the 27th Annual International conference of the IEEE Engineering in Medicine and Biology Society (EMBS), pp. 4, Aug. 30-Sep. 3, 2006, New York, NY.
The Effect of a Distributed Mass Loading on the Frequency Response of a MEMS Mesh Resonator
M. J. Bartkovsky, A. Liao, G. Fedder, T. Przybycien and S. Hauan
ABSTRACT:
© 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
This paper will live at http://www.ece.cmu.edu/~mems/pdfs/ieee/embs/0252_bartkovsky-2006.pdf, but it is not currently available. PATH: pdfs/ieee/embs/0252_bartkovsky-2006.pdf


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