CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM), pp. 632-635, April 19-21, 1999, San Juan, PR, USA.
Analytical Modeling of Cross-axis Coupling in Micromechanical Springs
S. V. Iyer, Y. Zhou and T. Mukherjee
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each spring type in order to verify the models and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for use in nodal simulation. Improvement in simulation time using the macromodel over beam based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.
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