CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM), pp. 632-635, April 19-21, 1999, San Juan, PR, USA.
Analytical Modeling of Cross-axis Coupling in Micromechanical Springs
S. V. Iyer, Y. Zhou and T. Mukherjee
ABSTRACT:
Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range of spring dimensions for each spring type in order to verify the models and determine the validity range. The models for the serpentine spring are then incorporated into a macromodel for use in nodal simulation. Improvement in simulation time using the macromodel over beam based simulation is evaluated. Cross-axis coupling in an accelerometer structure is also simulated using this macromodel.
© 1999 Computational Publications. Abstracting is permitted with credit to the source. Other copying, reprint or repoduction requests should be addressed to: Copyrights Manager, Computational Publications, Copyright Office, 899 Rue Jean de Gingins, 01220 Divonne les Bains, France. Computational Publications is a subsuduary of the Applied Computational Researh Society, a non-profit organization
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