CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM), pp. pp. 139-142, April 19-21, 1999, San Juan, PR, USA.
Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS
A. Dewey, H. Dussault, J. Hanna, E. Christen, G. Fedder, B. Romanowicz and M. Maher
ABSTRACT:
This paper presents an approach to defining and characterizing component models that promotes the establishment of reusable intellectual property (IP) for micro electromechanical systems (MEMS), in particular, and composite microsystems, in general. System dynamical behavior is mathematically characterized as coupled sets of ordinary algebraic and differential equations (DAEs), using the basic laws of conservation of energy governing electrical and mechanical networks combined with branch constitutive relations (BCRs) governing network elements. The ordinary algebraic and differential equations are described in the behavioral analog hardware description language (AHDL) VHDL-AMS, using a common modeling methodology and associated set of constructs. An example composite system model is given of an electromechanical loudspeaker.
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