CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 496-501, January 23-27, 2000, Miyazaki, Japan.
A CMOS Z-AXIS CAPACITIVE ACCELEROMETER WITH COMB-FINGER SENSING
H. Xie and G. Fedder
ABSTRACT:
This paper reports the first design and experimental results of a z-axis accelerometer that utilizes sidewall capacitance change of multiconductor comb fingers. The accelerometer has a fully differential capacitive bridge interface and its fabrication is compatible with standard CMOS processes. The frequency response of the accelerometer is characterized both electrically and optically and about 9.3 kHz resonant frequency is measured, which matches MEMCAD simulation within 15%. Measured sensitivity is 0.5 mV/g with less than -40 dB cross-axis sensitivity, noise floor 6 mg/rtHz, and linear range from -27g to 27g.
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