CMU MEMS Laboratory Publication Abstract

 

in M.S. Thesis, August 2005, Carnegie Mellon University, Pittsburgh, PA.
Modeling and Design of An RF-MEMS Reconfigurable LC-based Bandpass Filter
H. Akyol
ABSTRACT:
CMOS-MEMS tunable capacitors, micromachined inductors and wiring interconnects fabricated in Jazz 0.35 μm BiCMOS and ST Microelectronics 0.25 μm processes have been modeled. These models were verified by comparing the simulation and measurement results of first and second generation RF-MEMS reconfigurable LC-based bandpass filters. The modeled and extracted model parameters matched well. Third generation RF-MEMS reconfigurable LC-based bandpass filter with CMOS-MEMS tunable capacitors, micromachined inductors and wiring interconnect models is designed for covering the lowest three frequency bands of Ultra-Wide Band (UWB) with an insertion loss lower than 4 dB. The filter is fabricated in ST Microelectronics 0.25 μm process and post-processed in Carnegie Mellon University.
© 2005 Carnegie Mellon University, Department of Electrical and Computer Engineering.
Full paper (PDF) (opens in new window).


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