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| The proposed MEMS stress sensor comprises an array of piezoresistive sensor "pixels" to detect stress across the interfacial area between the MEMS chip and bone with resolution to 100 Pa, in 1 sec averaging. The sensors are located within a textured surface to accommodate sensor integration into bone. From initial research, surfac topography with 30-60 µm features was found to be conductive to guiding new cell growth. Finite element analysis has led to a sensor design for normal and shear stress detection. |
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