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A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non- trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.
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