CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 205-208, March 27-29, 2000, San Diego, CA, USA.
Low-Order Squeeze Film Model for Simulation of MEMS Devices
S. Vemuri, G. Fedder and T. Mukherjee
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non- trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.
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