CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 205-208, March 27-29, 2000, San Diego, CA, USA.
Low-Order Squeeze Film Model for Simulation of MEMS Devices
S. Vemuri, G. Fedder and T. Mukherjee
ABSTRACT:
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity 3D numerical simulations using non- trivial boundary conditions. This low-order model has been added to the NODAS MEMS schematic library for system level design of MEMS. The results of system-level simulation of a CMOS micromechanical bandpass filter using this damping model are presented.
© 2000 Computational Publications. Abstracting is permitted with credit to the source. Other copying, reprint or repoduction requests should be addressed to: Copyrights Manager, Computational Publications, Copyright Office, 899 Rue Jean de Gingins, 01220 Divonne les Bains, France. Computational Publications is a subsuduary of the Applied Computational Researh Society, a non-profit organization
Full paper not available from outside CMU


This page was generated in 0.010083 seconds at 12:25:30 pm EST on 21 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon