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At Carnegie Mellon University, we have developed a range of acoustic devices based on CMOS-MEMS: audio-range microphones and speakers, digital sound reconstruction using arrays of speakers and ultrasonic sensors for use in liquids. We discuss the design, fabrication and performance of each of these devices. We describe the mechanical design and fabrication steps to create a diaphragm in CMOS-MEMS and discuss the advantages of CMOS-MEMS membranes with regard to thermomechanical noise, sensitivity and vibration rejection. For each of the devices, the acoustics are described, with attention to the special considerations needed for MEMS-scale devices versus macroscopic devices.
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Full paper not available from outside CMU
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