CMU MEMS Laboratory Publication Abstract


in CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 137-191, January 2005.
Monolithically Integrated Inertial Sensors
G. Fedder, J. Chae, K. Najafi, T. Denison, J. Kuang and S. Lewis
This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.
© 2005 Copyright WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, Germany. All rights reserved.
Full paper not available from outside CMU

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