CMU MEMS Laboratory Publication Abstract

 

in Design, Test and Microfabrication of MEMS/MOEMS (DTM), pp. 58-69, Mar. 30-Apr. 1, 1999, Paris, France.
MEMS Resonator Synthesis for Testability
N. Deb, S. V. Iyer, T. Mukherjee and S. Blanton
ABSTRACT:
We combine our MEMS synthesis and test capabilities into a synthesis-for-test environment. A microresonator design meeting a variety of specifications is synthesized. The susceptibility of this design is then measured using our MEMS contamination analyzer. The nature of each defective microresonator is determined and the deviation from nominal performance is correlated to the bounds and design constraints used in the synthesis process. Feedback from this analysis is formulated into additional design constraints for the synthesis tool with the object of minimizing the impact of spot contaminations. Re-synthesis of the same designs using these additional constraints indicates that a certain class of catastrophic and parametric faults can be reduced by 25% without sacrificing performance.
© 1999 SPIE - The International Society for Optical Engineering. Any request of reprint should be addressed to spie@spie.org or phone +1 260 676 3290.
Full paper not available from outside CMU


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