CMU MEMS Laboratory Publication Abstract


in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 236-239, January 21-25, 2001, Interlaken, Switzerland.
CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation
J. Neumann and K. Gabriel
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with signal processing electronics will enable a variety of applications including economical earphones, microphones, hearing aids, high-fidelity earphones, cellular phones and noise cancellation. The large compliance of the CMOS-MEMS membrane also promises application as a sensitive microphone and pressure sensor.
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