CMU MEMS Laboratory Publication Abstract

 

	in IEEE Journal of Selected Topics in Quantum Electronics, Volume 10, Number 3, pp. 636-642, June 2004.
	A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography
	A. Jain, A. Kopa, Y. Pan, G. Fedder and H. Xie ABSTRACT:
	This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4×4 pixel display using this two-dimensional micromirror device has been demonstrated.
	© 2004 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
	Full paper (PDF) (opens in new window).

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