CMU MEMS Laboratory Publication Abstract

 

in IEEE Journal of Selected Topics in Quantum Electronics, Volume 10, Number 3, pp. 636-642, June 2004.
A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography
A. Jain, A. Kopa, Y. Pan, G. Fedder and H. Xie
ABSTRACT:
This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4×4 pixel display using this two-dimensional micromirror device has been demonstrated.
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Full paper (PDF) (opens in new window).


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