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in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp. 3-14, May 9-11, 2000, Paris, France. |
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The long term impact of MEMS technology will be in its ability to integrate novel sensing and actuation functionality on
traditional computing and communication devices enabling the ubiquitous digital computer to interact with the world around
it. The design of such integrated systems will occur at the system level, driven primarily by the application. Methodologies
that ease the integration of the digital domain to the real world using mixed domain technologies are therefore crucial. A hierarchical
structured design approach that is compatible with standard IC design is outlined. It starts with schematic capture of a
design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. This flow is
based on a process-independent design representation of commonly used MEMS building blocks, and process-dependent
materials properties, design rules, and parasitic parameters.
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Full paper not available from outside CMU
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